Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs

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Title: Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs
Author: Christopher, Julie; Kuhl, Michael; Hirschman, Karl
Abstract: A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction will have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine dispatching rules as well as their interaction are shown to have a significant impact.
Record URI: http://hdl.handle.net/1850/10253
Date: 2005-09

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