Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs

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dc.contributor.author Christopher, Julie
dc.contributor.author Kuhl, Michael
dc.contributor.author Hirschman, Karl
dc.date.accessioned 2009-07-23T20:24:12Z
dc.date.available 2009-07-23T20:24:12Z
dc.date.issued 2005-09
dc.identifier.citation In the Proceedings of the 2005 IEEE International Symposium on Semiconductor Manufacturing, pp. 84-87, Septmeber 2005 en_US
dc.identifier.uri http://hdl.handle.net/1850/10253
dc.description.abstract A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction will have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine dispatching rules as well as their interaction are shown to have a significant impact. en_US
dc.language.iso en_US en_US
dc.title Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs en_US
dc.type Proceedings en_US

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