Capacity analysis of automated material handling systems in semiconductor fabs

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dc.contributor.author Kuhl, Michael
dc.contributor.author Christopher, Julie
dc.date.accessioned 2009-07-24T15:28:07Z
dc.date.available 2009-07-24T15:28:07Z
dc.date.issued 2004
dc.identifier.citation In the Proceedings of the 2004 Winter Simulation Conference, Piscataway, New Jersey, 2004 en_US
dc.identifier.uri http://hdl.handle.net/1850/10261
dc.description.abstract A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved to-ward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity. en_US
dc.language.iso en_US en_US
dc.title Capacity analysis of automated material handling systems in semiconductor fabs en_US
dc.type Proceedings en_US

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