Model automatic focusing system for linewidth measuring instruments

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Title: Model automatic focusing system for linewidth measuring instruments
Author: Ingraham, John
Abstract: This paper discusses research on an automatic focusing system for IC-linewidth measuring instruments. The instrument incorporates a collimated light source, a device to move a sample in small, precise increments, and a charge-coupled device. The autofocusing model would measure the step-height of a dielectric sample and correlate the height to a focus position. Thickness of samples on an enlarged scale were measured to verify the feasibility of this device.
Record URI: http://hdl.handle.net/1850/11372
Date: 1985-05

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