Automated aberration extraction using phase wheel targets

Show full item record

Title: Automated aberration extraction using phase wheel targets
Author: Zavyalova, Lena; Bourov, Anatoly; Smith, Bruce
Abstract: An approach to in-situ wavefront aberration measurement is explored. The test is applicable to sensing aberrations from the image plane of a microlithography projection system or a mask inspection tool. A set of example results is presented which indicate that the method performs well on lenses with a Strehl ratio above 0.97. The method uses patterns produced by an open phase figure1 to determine the deviation of the target image from its ideal shape due to aberrations. A numerical solution in the form of Zernike polynomial coefficients is reached by modeling the object interaction with aberrated pupil function using the nonlinear optimization routine over the possible deformations to give an accurate account of the image detail in 2-D. The numerical accuracy for the example below indicated superb performance of the chosen target shapes with only a single illumination setup.
Record URI: http://hdl.handle.net/1850/11386
Date: 2005

Files in this item

Files Size Format View
BSmithConfProc2005.pdf 371.8Kb PDF View/Open

The following license files are associated with this item:

This item appears in the following Collection(s)

Show full item record

Search RIT DML


Advanced Search

Browse