Direct measurement of optical constants of metals from a KrF excimer using polarization methods

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dc.contributor.author Turgut, Suleyman
dc.contributor.author Smith, Bruce
dc.date.accessioned 2010-02-03T22:07:35Z
dc.date.available 2010-02-03T22:07:35Z
dc.date.issued 1995-07
dc.identifier.citation Proceedings of the SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control IX, vol 2439, pp. 503-505, July 1995 en_US
dc.identifier.uri http://hdl.handle.net/1850/11411
dc.description.abstract A simple null modulation-polarization method of measuring optical constants of metals has been adapted for operation with a KrF 248nm excimer laser. The approach requires only 3 optical components to extract the real and imaginary parts of the index of refraction (n,k). Experimental results will show good agreement to reference values for several metals (Cr, Au, Al) and Si. en_US
dc.language.iso en_US en_US
dc.publisher SPIE en_US
dc.relation.ispartofseries vol. 2439 en_US
dc.title Direct measurement of optical constants of metals from a KrF excimer using polarization methods en_US
dc.type Proceedings en_US

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