Near field optical microscopy characterization of IC metrology

Show full item record

Redirect: RIT Scholars content from RIT Digital Media Library has moved from to RIT Scholar Works, please update your feeds & links!
Title: Near field optical microscopy characterization of IC metrology
Author: Toledo-Crow, Ricardo; Smith, Bruce; Rogers, Jon; Vaez-Iravani, Mehdi
Abstract: Images of a microlithographic sample obtained using a new near field scanning optical microscope (NSOM) that uses force regulation of the sample-tip separation are presented. The NSOM is a research instrument fitted with a metal covered glass tip probe that defines a small aperture at the sharp end. The aperture is estimated to be on the order of 100 nanometers in diameter resulting in a resolution exceeding that of diffraction limited systems. This form of microscopy can be done both in the transmission and the reflection modes. The force regulation mechanism produces a simultaneously obtained scanned force microscope (SFM) image of the topography thus permitting correlative imaging of the sample. The samples are imaged in transmission and reflection near field optical format, with white light and with coherent light. The results are compared with other forms of IC imaging and characterization, namely scanned force microscopy (SFM) and scanning electron microscopy (SEM).
Record URI:
Date: 1994-02-03

Files in this item

Files Size Format View
BSmithConfProc02-03-1994.pdf 465.5Kb PDF View/Open

The following license files are associated with this item:

This item appears in the following Collection(s)

Show full item record

Search RIT DML

Advanced Search