The use of plasma-generated silicon dioxide-like coatings as charge storage media for electrets

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Title: The use of plasma-generated silicon dioxide-like coatings as charge storage media for electrets
Author: Lin, Xiaorong
Abstract: The object of this project is to study the electret properties of silicon dioxide coating. Silicon dioxide coatings were produced by microwave plasma chemical vapor deposition under various conditions such as pressure, flow ratio, power, etc.. DC bias, thermionic emission and corona charge were used to produce charges in the silicon dioxide film. The results include measurements of deposition rate of silicon dioxide, the absorption wavenumbers, the thickness and index of silicon dioxide coating. The electret properties were focused on the charging process, charge distribution and charge decay rate.
Record URI: http://hdl.handle.net/1850/11450
Date: 1993-11

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