Process development of a novel pseudo two-phase CCD pixel using transparent conduction oxide electrodes

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Title: Process development of a novel pseudo two-phase CCD pixel using transparent conduction oxide electrodes
Author: Fullerton, Daniel
Abstract: A microelectronic fabrication process for an all-transparent electrode, pseudo two-phase CCD image sensor pixel, resistant to DC shorting and compatible with a self-aligned barrier implant, was proposed, boasting the advantage of simple and cost-effective fabrication combined with high responsivity over the entire wavelength spectrum of visible light. The feasibility of such a process was proven by fabricating, testing, and analyzing a DC version of the device structure. Work entailed individual process design and development, integration of unit processes into a manufacturing flow, fabrication, testing, and failure analysis. Countermeasures to high-frequency failure modes were implemented as part of the second-generation design. Prototype devices were fabricated and tested for DC yield on 150 mm silicon wafers using standard semiconductor processing steps exclusively at Eastman Kodak Company in the Image Sensor Solutions B81S Microelectronic Fabrication Facility.
Record URI: http://hdl.handle.net/1850/14898
Date: 2003-05-30

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