A Silicon p-i-n detector for a hybrid CMOS imaging system

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dc.contributor.advisor Hirschman, Karl
dc.contributor.author Shea, Christopher
dc.date.accessioned 2012-07-18T19:45:34Z
dc.date.available 2012-07-18T19:45:34Z
dc.date.issued 2012-02
dc.identifier.uri http://hdl.handle.net/1850/15240
dc.description.abstract A fully depleted silicon p-i-n image sensor for a very low noise hybrid CMOS imaging system was simulated, fabricated, and electrically characterized. The image sensor was then bonded to the foundry fabricated CMOS circuitry to create the imaging system. SILVACO Atlas was used to simulate the steady state electrical operation of the device as well as the optical response. Revisions were made to an existing mask set to allow the use of both contact and projection lithography in the fabrication process. Significant process improvements were introduced to eliminate needless complexity and reduce leakage current from the previously reported 1.5x10-6 A/cm2 below the goal of 2.2x10-9 A/cm2. Following fabrication of the image sensors, electrical testing was performed to verify diode quality from leakage and lifetime measurements. A lift-off process was developed for thick metal layers used in the bump-bond hybridization process. Daisy-chain test parts were created to characterize the mechanical and electrical connections formed in the hybridization process. Fabricated p-i-n photodiode arrays were diced and hybridized to read-out integrated circuits using a flip-chip bump bond process with indium interconnects. Testing of hybridized devices is currently ongoing. en_US
dc.language.iso en_US en_US
dc.subject CMOS en_US
dc.subject Hybrid en_US
dc.subject Image sensors en_US
dc.subject Microelectronics en_US
dc.subject p-i-n en_US
dc.subject Silicon en_US
dc.subject.lcc TK7871.99.M44 S43 2012
dc.subject.lcsh Optical detectors--Design and construction en_US
dc.subject.lcsh Silicon diodes--Design and construction en_US
dc.subject.lcsh Metal oxide semiconductors, Complementary en_US
dc.subject.lcsh Imaging systems en_US
dc.title A Silicon p-i-n detector for a hybrid CMOS imaging system en_US
dc.type Thesis en_US
dc.description.college Kate Gleason College of Engineering en_US
dc.description.department Department of Electrical and Microelectronic Engineering en_US

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