Integration of micromachined thermal thermal shear stress sensors with microchannels - design, fabrication and testing

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Title: Integration of micromachined thermal thermal shear stress sensors with microchannels - design, fabrication and testing
Author: Kulkarni, Vinod Dilip
Abstract: Rochester Institute of Technology, 2005 Includes bibliographical references (leaves 91-96) "The emerging picture of microvascular flow strongly suggests that local gradients in shear rate along the arteriole walls play an integral role in the ability of a microvascular network to regulate and modify blood flow. The methods to estimate shear stress from approximations of the velocity profiles determined by in vivo particle tracking experiments in the hamster and computational simulation are limited by assumptions made about the flow and experimental techniques. Right now, our ability to relate wall shear stress in microvessels to corresponding biological function is limited by our ability to accurately determine shear stress. A three dimensional computational model was created to simulate the system's thermal response to the constant temperature control circuit. The model geometry included all fabricated layers in thermal shear stress sensor and the microchannel structure (17 microns x 17 microns). This computational technique was used to optimize the dimensions of the system in order to reduce the amount of heat lost to the substrate and maximize the signal response. Hot film thermal shear stress sensors were successfully integrated with microchannel using surface micromachining technique. The entire device was fabricated and tested at Semiconductor Microsystems Fabrication Laboratory (SMFL) at RIT. This thesis discusses the design and optimization of a thermal shear stress sensor using computational techniques to simulate the sensor's performance in microchannel models of arteriole bifurcations. An attempt has been made to verify thermal-transfer principle of hot film shear stress sensors in microchannels
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Date: 2005

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