Nano- and microoptoelectromechanical systems and nanoscale active optics

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dc.contributor.author Lyshevski, Sergey
dc.contributor.author Lyshevski, Marina
dc.date.accessioned 2009-04-08T14:44:19Z
dc.date.available 2009-04-08T14:44:19Z
dc.date.issued 2003-08-14
dc.identifier.isbn 0-7803-7976-4
dc.identifier.uri http://hdl.handle.net/1850/8894
dc.description Copyright 2003 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. en_US
dc.description.abstract Significant progress has been made in nano- and microoptoelectromechanical systems (NOEMS and MOEMS) in last years. However, formidable challenges remain and novel design concepts are sought. The technologies has been developed to fabricate MOEMS that integrate nanostructures and nanodevices including mirrors, lenses, magnets, antennas, actuators, etc. We study MOEMS that integrate vertical cavity surface emitting laser (VCSEL), active optoelectromagnetic-active nanostructures (Bragg cells and optoelectromagnetic lenses), radiating energy nanodevices (antennas) and controlling/processing nanoscale integrated circuits (nanoICs). Ideally, this MOEMS should be designed and fabricated utilizing the Microsystem-on-Chip paradigm. This paper focuses on the fundamental problems in synthesis, system-level integration, high-fidelity modeling, heterogeneous simulation, data-intensive analysis and optimization. The results reported significantly contribute to newly emerging microoptosystems that can be used in wireless communication, laser scanners, optical interconnects, etc. en_US
dc.language.iso en_US en_US
dc.publisher IEEE en_US
dc.relation.ispartofseries Vol. 2 en_US
dc.subject Microsystems en_US
dc.subject MOEMS en_US
dc.subject Nanosystems en_US
dc.subject Optics en_US
dc.title Nano- and microoptoelectromechanical systems and nanoscale active optics en_US
dc.type Proceedings en_US

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