An Electromagnetic MEMS actuator for micropumps

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Title: An Electromagnetic MEMS actuator for micropumps
Author: Getpreecharsawas, Jirachai; Puchades, Ivan; Hournbuckle, Bobby; Fuller, Lynn; Pearson, Robert; Lyshevski, Sergey
Abstract: In this paper, design, fabrication and evaluation of an electromagnetic MEMS micropump actuator are reported. Based on MEMS technology, the proposed micropump actuator is designed and fabricated using integrated surface and bulk micromachining at the Microfabrication Facility at the Rochester Institute of Technology. A thin silicon diaphragm with a planar spiral coil ensures the desired degree of robustness and guarantees the specified volumetric changes. The magnetic force is generated due to the interaction between the magnetic field of a permanent magnet and current in the coil. The experimental results are reported.
Description: Copyright 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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Date: 2006-05

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