MOEMS with thin-film crystals

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Title: MOEMS with thin-film crystals
Author: Lyshevski, Marina; Lyshevski, Sergey
Abstract: In this paper we examine high-performance micro-opto-electro-mechanical systems (MOEMS). The studied MOEMS composed from optoelectromagnetic active high-refractive index thin-film crystals, radiating energy devices (antenna), variable-wavelength vertical cavity surface emitting laser (VCSEL), and driving/controlling integrated circuits (lCs). In order to steer and accurately position a beam, we vary the high-frequency electric field and light wavelength. Experimental, applied and fundamental results are reported.
Description: Copyright 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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Date: 2006-05

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