Design and fabrication of microactuators and sensors for MEMS

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Title: Design and fabrication of microactuators and sensors for MEMS
Author: Puchades, Ivan; Pearson, Robert; Fuller, Lynn; Gottermeier, Sara; Lyshevski, Sergey
Abstract: This paper reports the results for various microelectromechanical systems, devices and structures fabricated using bulk and surface micromachined processes. These microelectromechanical systems (MEMS) are designed and fabricated at the Semiconductor Micro-Fabrication Facility Laboratory at Rochester Institute of Technology. The microactuators and sensors are designed and fabricated for proof-of-concept lab-on-a-chip systems. The experimental results, which include testing, evaluation and characterization of microelectromechanical actuators and sensors, are reported.
Description: Copyright 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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Date: 2007-05

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