Design and fabrication of microactuators and sensors for MEMS

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dc.contributor.author Puchades, Ivan
dc.contributor.author Pearson, Robert
dc.contributor.author Fuller, Lynn
dc.contributor.author Gottermeier, Sara
dc.contributor.author Lyshevski, Sergey
dc.date.accessioned 2009-04-08T15:14:05Z
dc.date.available 2009-04-08T15:14:05Z
dc.date.issued 2007-05
dc.identifier.isbn 978-966-553-614-7
dc.identifier.uri http://hdl.handle.net/1850/8983
dc.description Copyright 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. en_US
dc.description.abstract This paper reports the results for various microelectromechanical systems, devices and structures fabricated using bulk and surface micromachined processes. These microelectromechanical systems (MEMS) are designed and fabricated at the Semiconductor Micro-Fabrication Facility Laboratory at Rochester Institute of Technology. The microactuators and sensors are designed and fabricated for proof-of-concept lab-on-a-chip systems. The experimental results, which include testing, evaluation and characterization of microelectromechanical actuators and sensors, are reported. en_US
dc.language.iso en_US en_US
dc.publisher IEEE en_US
dc.subject ICs en_US
dc.subject MEMS en_US
dc.subject Microactuator en_US
dc.subject Sensor en_US
dc.title Design and fabrication of microactuators and sensors for MEMS en_US
dc.type Proceedings en_US

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