Comment on “A Prototype SECS message service for communication in the semiconductor manufacturing environment"

Show full item record

Title: Comment on “A Prototype SECS message service for communication in the semiconductor manufacturing environment"
Author: Baratz, James; Birchak, John; Brehm, Frederic; Vallino, James
Abstract: The protocol described in the article “A Prototype SECS Message Service for Communication in the Semiconductor Manufacturing Environment”’ was designed in cooperation with the Subnet Task Force of the Semiconductor Equipment and Materials International (SEMI) Communications Standards Committee. The technical design and a software implementation were carried out at the University of Michigan with frequent reviews by the task force, particularly during the early months. The primary development of SMS was done by James R. Moyne as a research project directed by Prof. Leo C. McAfee, Jr., and supported by the Semiconductor Research Corporation. The published article reflects the services and protocol as agreed to by the Subnet through August 1988. Moyne produced a software implementation and also a demonstration which was shown at SEMICON/West’88.
Description: IEEE Transactions on semiconductor manufacturing article. Copyright 1989 IEEE.
Record URI: http://hdl.handle.net/1850/9854
Date: 1989

Files in this item

Files Size Format View
JBaratzArticle11-1989.pdf 155.0Kb PDF View/Open

The following license files are associated with this item:

This item appears in the following Collection(s)

Show full item record

Search RIT DML


Advanced Search

Browse