Micro-circuit reticle fabrication: an investigation of a silver halide emulsion as a portable conformable mask

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Title: Micro-circuit reticle fabrication: an investigation of a silver halide emulsion as a portable conformable mask
Author: St. Cin, Patrick
Abstract: An investigation of the possibility of spin-coating a silver halide emusion similar to that used on Kodak HRP plates onto a positive resist coating reticle blank was made. By changing the cating weight and temperature of the emulsion it was found that the emulsion could be coated onto the reticle without harm to the positive resist material. A five micron width line was imaged successfully and measured in the final chrome sub-layer of the reticle.
Record URI: http://hdl.handle.net/1850/9880
Date: 1983-04-22

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