Plasma-driven self-organization of Ni nanodot arrays on Si(100)

Show full item record

Redirect: RIT Scholars content from RIT Digital Media Library has moved from to RIT Scholar Works, please update your feeds & links!
Title: Plasma-driven self-organization of Ni nanodot arrays on Si(100)
Author: Levchenko, I.; Ostrikov, K.; Diwan, K.; Winkler, K.; Mariotti, D.
Abstract: The results of the combined experimental and numerical study suggest that nonequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si 100 surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of various materials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.
Record URI:
Date: 2009-11-03

Files in this item

Files Size Format View
DMariottiArticle11-03-2008.pdf 510.0Kb PDF View/Open

The following license files are associated with this item:

This item appears in the following Collection(s)

Show full item record

Search RIT DML

Advanced Search