Challenges in integration of resonant interband tunnel devices with CMOS

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Title: Challenges in integration of resonant interband tunnel devices with CMOS
Author: Sudirgo, Stephen; Curanovic, Branislav; Rommel, Sean; Hirschman, Karl; Kurinec, Santosh; Jin, Niu; Rice, Anthony; Berger, Paul; Thompson, Phillip
Abstract: The fabrication of SiGe Resonant Interband Tunnel Devices (RITD) using CMOS compatible processes requires ability to form RITD structures selectively on source/drain regions. Various approaches were investigated and RITDs have been realized in lithographically defined openings in oxide on Si wafers. Patterned growth RITD on p+ Si exhibited a peak-to-valley current ratio (PVCR) of 3.0 and peak current density (Jp) of 188 A/cm2 whereas RITD on p+ implanted regions resulted in a PVCR of 2.5 with Jp of 278 A/cm2. Blanket growth RITD on p+ implanted substrate yielded a superior PCVR of 3.3 and Jp of 332 A/cm2. The observed effects of patterned growth and implanted substrate on the RITD device performance are critical challenges addressed in this study for RITD-CMOS integration.
Description: 2003 IEEE conference proceedings of the 15th biennial University/Government/Industry Microelectronics Symposium.
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Date: 2003-06

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