Atmospheric microplasma in a wide-slit configuration for nanofabrication

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Title: Atmospheric microplasma in a wide-slit configuration for nanofabrication
Author: Wagner, A.; Mariotti, Davide
Description: Poster at the 30th International Symposium on Dry Processes, 26-28 November 2008, Tokyo, Japan.
Record URI: http://hdl.handle.net/1850/9973
Date: 2008-11

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