Investigation of microplasma cells fabricated on silicon wafer

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Title: Investigation of microplasma cells fabricated on silicon wafer
Author: Abalo-Akuvi, Koffi; Mariotti, Davide
Description: Non-presenting author at the 26th Annual Conference on Microelectronic Engineering, 12-14 May 2008, Rochester (NY), USA. Held by the Microelectronic Engineering program of the Rochester Institute of Technology (RIT).
Record URI: http://hdl.handle.net/1850/9988
Date: 2008-05

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